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Six-axis Motorized Piezo Stage

Products / Optomechanics /Motorized Piezo Stage /Multi Axis Motorized Piezo Stages / Six-axis Motorized Piezo Stage /

Multi Axis Motorized Piezo Stages, X Stage Stroke +/-12.5mm, X Stage Minimum Step Size 100nm, X Stage Repeatability +/-300nm, Y Stage Stroke +/-12.5mm, Y Stage Minimum Step Size 100nm, Y Stage Repeatability +/-300nm, Z Stage Stroke +/-10 mm, Z Stage Minimum Step Size 100nm, Z Stage Repeatability +/-300nm, R Stage Stroke +/-5°, R Stage Minimum Step Size 0.0002°, R Stage Repeatability+/-0.0004°, G Stage Stroke+/-5°, G Stage Minimum Step Size 0.0002°, G Stage Repeatability +/-0.0004°, Maximum Fixed Load 0.15KG, Maximum Speed 20mm/s（Open Loop）

MODEL:Six-axis Motorized Piezo Stage

6-8 weeks Drawings

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* The prices are indicative only. Please contact us for an official quote. This is single product page, for detail specification please refer to product main page


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Compare Model Drawings & Specs Availability Reference Price

Product Specifications

Model Six-axis Motorized Piezo Stage G Stage Minimum Step Size(°) 0.0002
X Stage Stroke(mm) +/-12.5 G Stage Repeatability(°) +/-0.0004
X Stage Minimum Step Size(nm) 100 Position Sensor(nm) Grating
X Stage Repeatability(nm) +/-300 Position Sensor Resolution 100
Y Stage Stroke(mm) +/-12.5 Driver Piezoelectric Motor
Y Stage Minimum Step Size(nm) 100 Maximum Fixed Load(KG) 0.15
Y Stage Repeatability(nm) +/-300 Maximum Speed(mm/s) 20（Open Loop）
Z Stage Stroke(mm) +/-10 Material Aluminum Alloy
Z Stage Minimum Step Size(nm) 100 Power Supply 220VAC
Z Stage Repeatability(nm) +/-300 Maximum Power Consumption(W) 50
R Stage Stroke(°) +/-5 Operating Temperature(°C) 15-35
R Stage Minimum Step Size(°) 0.0002 Working Humidity 0-85%
R Stage Repeatability(°) +/-0.0004 Storage Temperature(°C) -40-70 
G Stage Stroke(°) +/-5 Weight(KG) 6.4

 

Six-axis Motorized Piezo Stage - Parameter

XYR-202020 - Parameter

ST-XY3-5050+ST-VS-0812 - Parameter

ST-XY3-5050+ST-VS-0812 - Parameter

Customized Multi Axis Motorized Piezo Stage - Parameter

Six-axis Motorized Piezo Stage - Download

XYR-202020 - Download

ST-XY3-5050+ST-VS-0812 - Download

ST-XY3-5050+ST-VS-0812 - Download

Customized Multi Axis Motorized Piezo Stage - Download

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