Multi Axis Motorized Piezo Stages | SIMTRUM Photonics Store

Three-axis Motorized Piezo Stage - ST-XY3-5050+ST-VS-0812

SIMTRUM's three-axis motorized piezo stage (ST-XY3-5050+ST-VS-0812) is a XYZ stage with +/-25mm stroke  for  X,Y stage and +/-6mm for Z stage. It has repeatability up to +/-200nm.

 

Feature
Piezoelectric motor drive, self-locking when power off, saving energy and reducing heat generation Simple and compact design Grating feedback, optional resolution Can be used in optical assembly, micro-nano processing, laser, automation and other fields

 

 

 

Product Specifications and Brochures

Product Brochure Link:

Model	Three-axis Motorized Piezo Stage(ST-XY3-5050+ST-VS-0812)
X,Y Stage Stroke(mm)	+/-25
Z Stage Stroke(mm)	+/-6
Driver	Piezoelectric Motor
Maximum Load Capacity(KG)	2
Maximum Speed(mm/s)	30
X,Y Stage Minimum Step Size(nm)	50
X,Y Stage Repeatability(nm)	+/-200
Z Stage Minimum Step Size(nm)	50
Z Stage Repeatability(nm)	+/-200
Material	Aluminum Alloy

 

 

 

Drawings

Front	Back	Side

Three-axis Motorized Piezo Stages 

These three-axis motorized piezo stages are XYR stages,with X,Y stage stroke up to +/-25mm and R stage stroke up to 20°.

 

Feature
Piezoelectric motor drive, self-locking when power off, saving energy and reducing heat generation Simple and compact design Grating feedback, optional resolution Can be used in optical assembly, micro-nano processing, laser, automation and other fields

 

 

Product Specifications and Brochures

Product Brochure Link:

Model	Three-axis Motorized Piezo Stage(ST-XY3-5050+ST-RS-100C)	Three-axis Motorized Piezo Stage(XYR-202020)
Image
X,Y Stage Stroke(mm)	+/-25	20
R Stage Stroke(°)	+/-6	20
Driver	Piezoelectric Motor	Piezoelectric Motor
Maximum Load Capacity(KG)	10	/
Maximum Speed(mm/s)	30	50
Minimum Step Size(nm)	/	200
X,Y Stage Minimum Step Size(nm)	100	/
X,Y Stage Repeatability(nm)	+/-200	+/-300nm
R Stage Minimum Step Size(°)	0.0005	/
R Stage Repeatability(°)	+/-0.0005	+/-0.001
Position Sensor	/	Grating
Material	Aluminum Alloy	Aluminum Alloy
Weight(KG)	/	8.5

 

 

Drawings

 

ST-XY3-5050+ST-RS-100C

Front	Side	Side

 

 

 

 

ST-XYR20-202020

 

Front	Back	Side

Six-axis Motorized Piezo Stages

Our six-axis motorized piezo stage includes X stage, Y stage, Z stage, R stage, G stage.It can be used in optical assembly, micro-nano processing, laser, automation and other fields.

 

 

Feature
Piezoelectric motor drive, self-locking when power off, saving energy and reducing heat generation Simple and compact design Grating feedback, optional resolution Can be used in optical assembly, micro-nano processing, laser, automation and other fields

 

 

Product Specifications and Brochures

Product Brochure Link:

Model	Six-axis Motorized Piezo Stage	G Stage Minimum Step Size(°)	0.0002
X Stage Stroke(mm)	+/-12.5	G Stage Repeatability(°)	+/-0.0004
X Stage Minimum Step Size(nm)	100	Position Sensor(nm)	Grating
X Stage Repeatability(nm)	+/-300	Position Sensor Resolution	100
Y Stage Stroke(mm)	+/-12.5	Driver	Piezoelectric Motor
Y Stage Minimum Step Size(nm)	100	Maximum Fixed Load(KG)	0.15
Y Stage Repeatability(nm)	+/-300	Maximum Speed(mm/s)	20（Open Loop）
Z Stage Stroke(mm)	+/-10	Material	Aluminum Alloy
Z Stage Minimum Step Size(nm)	100	Power Supply	220VAC
Z Stage Repeatability(nm)	+/-300	Maximum Power Consumption(W)	50
R Stage Stroke(°)	+/-5	Operating Temperature(°C)	15-35
R Stage Minimum Step Size(°)	0.0002	Working Humidity	0-85%
R Stage Repeatability(°)	+/-0.0004	Storage Temperature(°C)	-40-70
G Stage Stroke(°)	+/-5	Weight(KG)	6.4

 

 

Drawings

 

Side	Side	Top

Motorized Piezo Stage Controller for Three Axis 

 

1.Control box

 

Control Box	Front Panel	Back Panel

 

 

1.1 Power Interface

Using the DC interface, the input power is: 24V (20V~30V).

 

1.2 Communication Interface

Using a B-type USB cable.

1.3 Indicator Light The indicator light is divided into status indicator light and power indicator light."POWER" is the power indicator light, which is used to indicate whether the power is on.   There are 6 status indicator lights, with two lights representing the status of each axis .From top to bottom,the indicator lights represent axis 1 to axis 3. In the same row, the left side is for ALARM1, and the right side is for ALARM2 (As shown in the left figure)

Meaning of Indicator Lights

Indicator Light	Green Flashing	Steady Green	Red Flashing	Steady Red
ALARM1	/	Drive Enable	0.5s blinking once: searching for zero process.	Blocking Protection
ALARM2	Motor Access	/	(1) Blinking once: Communication input parameter error	Motor Not Plugged In
			(2) Blinking once every 1 second: BootLoader mode indicates no APP
			(3) Blinking once every 0.5 seconds: BootLoader mode
			(4) Blinking once every 0.1 seconds: BootLoader mode indicates no secret key,unable to enter APP

 

 

 

1.4  I/O Interface The interface used is DB9 female connector (As shown in the left figure). There are 3 DB9 connectors on the control box, corresponding to the I/O interface of axis 1, axis 2, and axis 3. Each DB9 interface is defined the same way and corresponds to the axis number used, as shown in the following table.

 

 

I/O Interface Structure	The Limit Switch Detection Circuit

 

 

 I/O Interface Definition

Hole Number	Definition	Illustrate
1	Pulse Output (Default)	Pulse Output Pin (Maximum Current 30mA)
2	Update Program	When updating the program, this pin is grounded
3	Motor Stop	/
4	- Limit	Limit Detection Pin (Maximum Current 30mA)
5	+ Limit	Limit Detection Pin (Maximum Current 30mA)
6	NULL	/
7	5V	Output 5V Power Supply (Maximum Output 1A)
8	Controller GND	GND

Note:When wiring the DB9 interface, please be careful to avoid short-circuits caused by miswiring. Short-circuits between pins can potentially damage the drive controller. Connecting to the NULL interface is strictly prohibited

 

 

1.5 Encoder Interface

The interface used is a DB15 female connector with two rows, and its specific definitions are shown in the following table.

 

 Encoder Interface Definition

Pin Number of DB15	Definition	Pin Number of DB15	Definition
1	NULL	9	0V
2	0V	10	NULL
3	NULL	11	NULL
4	Z-	12	Z+
5	B-	13	B+
6	A-	14	A+
7	5V	15	NULL
8	5V

 

 

1.6 Motor Interface

The interface used is a DB9 male connector with two rows, and its specific definitions are shown in the following table.

 

 Motor Interface Definition

Pin Number of DB9	Definition	Illustrate
1	Connected to GND	GND
2	NULL	/
3	Phase A	Connect to the motor
4	COM (Common)	Connect to the motor
5	Phase B	Connect to the motor
6	Detection	DB9 detection access
7	System Grounding	/
8	NULL	/
9	NULL	/

Note: Pins 6 and 7 are shorted for detecting DB9 access.Please cut off the power supply when connecting the patch cord, please do not impede the movement for a long time when the platform is driven ,or  the motor may be burn out.

 

 

2. Internal Structure

The inside of the control box includes a front panel PCB, a back panel PCB, and 3 controllers, which are connected together by connecting wires.

 

3.The steps to use the control box are as follows

1.To connect the plug of the stage to the controll box

(1) Insert the motor plug of the stage axis 1 (X) into the motor socket of axis 1 in the control box (DB9 connection), and insert the encoder plug of axis 1 (X) into the encoder socket of axis 1 in the control box (DB15 connection)

(2) Insert the motor plug of the stage axis 2 (Y) into the motor socket of axis 2 in the control box (DB9 connection), and insert the encoder plug of axis 2 (Y) into the encoder socket of axis 2 in the control box(DB15 connection)

(3) Insert the motor plug of the stage axis 3 (Z) into the motor socket of axis 3 in the control box(DB9 connection), and insert the encoder plug of axis 3 (Z) into the encoder socket of axis 3 in the control box(DB15 connection)

 

2.Connect the control box and the computer with the USB cable

 

3.Connect the circular plug of the 24V power adapter to the power socket on the control box

 

4.Turn on the power switch on the control box

 

5.Use the upper computer to control the stage (Refer to the relevant user manual for instructions on using the upper computer)

 

 

Motorized Piezo Stage

Product	Travel Distance	Max. Load Capacity	Max. Speed	Min. Step Size	Repeatability
Single Axis Motorized Piezo Stage	0 ~ 25 mm 90° ~ 360°	0.3 ~ 5 kg	20 ~ 100 mm/s ＞20°/s ~ 360°/s	50nm ~ 3um ＜0.0001° ~ 0.001°	± 100nm ~ ± 5um ± 0.0005° ~ ± 0.002°
XY Motorized Piezo Stages	50 x 25 mm ~ 105 x 105 mm	1 ~ 10 kg	50 ~ 100 mm/s	20 ~ 100nm	± 200nm
Multi Axis Motorized Piezo Stages	± 6 ~ ± 25 mm ± 5° ~ ± 6° (Customizable)	0.15 ~ 10 kg (Customizable)	20 ~ 50 mm/s (Customizable)	50 - 200 nm 0.0002° ~ 0.0005° (Customizable)	± 200 ~ ± 300nm ± 0.0004° ~ ± 0.0005° (Customizable)
XY Microscope Piezo Stages	75 x 50 mm ~ 110 x 75 mm	1 kg	100 mm/s	20 ~ 100 nm	± 200nm
Vacuum Non-magnetic Piezo Stage	18 ~ 70 mm	1 ~ 10 kg	100 mm/s	150 ~ 300 nm	± 500
Nano Electric Actuator	12 mm	1.5 kg	0.5 mm/s	30 nm	/

 

 

 

Confocal Microscope Systems

Our motorized piezo stage can be applied to microscope related systems ,  below is the confocal microscope systems we produced. if you need customized system please contact us.

	Laser Scanning Confocal Microscope		Laser Line Scan Confocal Microscope		Spinning Disk Confocal Microscope
	Structured Illumination Microscope		Wide Field Raman Microscope		Fluorescence / Photoluminescence Microscope

 

Parameters	Basic P Series Box	Basic P Series	Advance P Series	Basic L Series	Advance L Series	SpinDisk Basic	SpinDisk  Advance	SIM Basic	SpinDisk SIM
Image Frame Rate	4fps@512x512	4fps@512x512	4fps@512x512	10fps@1024x1024	14fps@1024x1024	100fps@2048x2048	100fps@2048x2048	13fps@1024x1024	13fps@1024x1024
Resolution	~230 nm	~230 nm	~230 nm	~230 nm	150-200nm	~230 nm	~230 nm	~100 nm	~100 nm
Image Depth	<100µm	<100µm	<100µm	<100µm	<600µm	<200µm	<200µm	<50µm	<200µm
No. of Laser	1	1	4	1	4	4	4	4	4
Wavelength Choice	405/445/488 /525/561/640(nm)	405/445/488/ 525/561/640(nm)	405/488/561/ 640(nm)	405/445/488/ 525/561/640(nm)	405/488/561/ 640(nm)	405/445/470/520/ 528/555/640(nm)	405/445/470/520/ 528/555/640(nm)	405/445/470/520/ 528/555/640(nm)	405/445/470/520/ 528/555/640(nm)
Detectors	Detector	Detector	Detector	CMOS Camera	sCMOS Camera	sCMOS Camera	Dual sCMOS Camera（Single sCMOS optional）	sCMOS Camera	Dual sCMOS Camera（Single sCMOS optional）
Microscope	Non	Inverted (Upright Customizeable)	Inverted (Upright Customizeable)	Inverted (Upright Customizeable)	Inverted (Upright Customizeable)	Inverted or Upright	Inverted or Upright	Inverted or Upright	Inverted
Stages	Non	Z Motorized XY Manual	XYZ Motorized	Z Motorized XY Manual	XYZ Motorized	XYZ Motorized	XYZ Motorized	XYZ Motorized	XYZ Motorized
Electronics system	/	/	Motorized Filter Motorized Pin hole	/	Motorized Filter	Motorized Filter	Motorized Filter	Motorized Filter	Motorized Filter

 

 

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