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Nano 3D Optical Surface Profilometers | SIMTRUM Photonic Store

Nano 3D Optical Surface Profilometers (System)


The SIMTRUM SVW1 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface. SIMTRUM SVW1 Optical 3D Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters  reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image.


For More Information please contact us:

info@simtrum.com

Product Brochure: Download



Technical Parameters

Model No.SIMTRUM SVW1SIMTRUM SVW1-Pro
Light SourceGreen LED
Video System1024 x 1024
Standard Field of View0.98 x 0.98 mm
Max Field of View
6.0 x 6.0 mm (Optional)
Lens Holder

3 holes-manual

XY Object TableSize320 x 200 mm300 x 300 mm
Moving Range140 x 100 mm200 x 200 mm
Loading Capacity10kg
Control MethodMotorized
Tilt±5°Manual
Z Azis FocusingMoving Range100 mm
Control MethodMotorized
Max Scanning Speed45 µm/s
Scanning Range of Z Axis10 mm
Resolution of Z Axis0.1 nm
Lateral Resolution0.1µm
Stage measurementUncertainty0.30%
Repeatability0.08% 1σ 
SizeL900 x W700 x H604 mmL900 x W700 x H700 mm
Weight< 150 kg< 160 kg
PowerAC100 ~ 240 V, 50/60 Hz, 4A, 300W

Remark: Performance parameters are tested by using a 4.7µm precision master stage gauge in lab according to ISO 4287 and ISO 25178


Standard configuration

Optional Configuration
1) Host machine

1) Parfocal objective lens: 2.5X, 5X, 10X, 50X,100X
2) High speed camera

2) Optical zoom: 0.75X, 1
3) Optical Zoom: 0.5x

3) Vacuum chuck: 4", 6" or 8
4) Parfocal Objective lens :10x

4) Motorized 5 holes turret
5) Motorized X & Y object table


6) 4.7μm stage master gauges

7) Joystick


8) XtremeVision software with automatic switching function

Environmental Requirement
9) Electrical control box

1) Operating environment: No strong magnetic field
10) Computer(WIN10) and 24" monitor

2) Working temperature:15℃~30℃, fuctuation <2℃/60min
11) Accessory suitcase

3) Relative humidity: 5%~95% RH, no condensation
12) Portable inflating pump

4) Environmental vibration: VC-C or better
13) User Manual and Product Certificate

5) Pressure supply: 0.6Mpa oil-free, water-free, 6mm diameter of hose



Application


It is used for measurement and analysis of surface roughness and profile of precision components from industries of semi-conductor, 3C Electronics, ultraprecise  achining, optical machining, micro-nano materials, micro-electro-mechanical system.



Application Case

Measurement and analysis for various products, components and materials`surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion, corrosion, gap, hole, stage, curvature, deformation, etc.


XtremeVision 3D Software

Integration software: Measurement and analysis are operated in the same interface; With pre-set analytic parameters, the software automatically generates  easurement data, and achieves rapid CNC measurement.


A. After set analytic program, more than 10 files can be analyzed by one click, finally data result and statistical graph are generated automatically.

B. 1) Auto Measurement: After set measuring ranges & points and related parameters, multi-area can be measured.

    2) Stitching Measurement: After set the measuring range and parameters, large area could be measured by one click automatically.

    3) Partial measurement: Can select any area in field of view to be measured.

C. Configure parameters: After pre-set leveling, filtering and 2D&3D parameters, data could be measured and generated automatically according to pre-set program.

D. 2D, 3D Image operating zone.

E. Analysis window: Display the curves and data generated by present analysis tool.

F. Real-time video window.


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