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Linear confocal displacement sensor | SIMTRUM Photonics Store

Products / Light Analysis /Spectral confocal displacement sensor /Linear confocal displacement sensor /
Linear confocal displacement sensor
Overview Specifications Software Applications Dimensions(mm) Order Now!
SIMTRUM'S Chromatic confocal line 3D measuring sensor employs a color laser confocal measurement method. The white laser emitted by the light source forms an ultra-fine strip-shaped measurement spot through the superchromatic aberration lens. The measured light spot reflects light of corresponding wavelengths at different positions on the surface of the object being measured. After returning from the superchromatic lens, it passes through the spectroscopic prism and enters the spectral receiving system. The super chromatic aberration lens can feed back ultra-high-resolution surface gray values, superimposing high-precision surface height measurement values and high-resolution surface gray measurement values together to achieve ultra-high-resolution surface contour measurement. Compared with point confocal displacement sensors, more information is obtained. Meanwhile, the internal mechanical structure adopts a cage design, which has strong vibration resistance and fully ensures the stability of the optical structure. 
 
The special CMOS sensor adopting ROCC technology (Fast on-Chip computing) has an image processing capability of up to 15.4 billion pixels per second and can achieve a 3D scanning speed of 7,000 contours per second in full-frame mode. The maximum scanning speed can reach 64,000 contours per second.
 
At the same time, a specially designed color laser light source and a slit filter device processed by semiconductor technology are adopted - achieving an extremely small measurement spot with extremely strong energy. And the scanning line is a truly complete ray of light, rather than a line pieced together by dots in similar products. On the premise of ensuring a length of 4.3mm in the X direction, the width in the Y direction is only 7 μ m. The super-chromatic aberration lens can be used to feedback surface gray-scale measurement values with extremely high resolution. By superimposing high-precision surface height measurement values and high-resolution surface gray-scale measurement values together, ultra-high-resolution surface contour measurement can be achieved.

Feature

  • High resolution
  • High precision， can be reach up to 0.1μm
  • Point cloud data collection capacity of 1.35 million points/second
  • High scanning and measurement speed, with the fastest measurement speed reaching 64KHz
  • Stable mechanical structure
  • Multi-functional measuring software

Probe specification
Model CCL - 5010 CCL - 5020 CCL - 5030 CCL - 5040 CCL - 5110
Points/Contour Lines 1928 1928 1832 1832 2000
Working Distance (mm) 11.5 11.5 10 10 36.5
Z - direction Range (mm) 0.77 0.8 1.3 1.3 3
X - direction Measurement Range (mm) 2.2 3.2 3 4.3 12
X - direction Resolution (μm) 1.2 1.7 1.6 2.4 6.2
Y - direction Resolution (μm) 2 2.5 2.5 3.5 7.5
Z - direction Accuracy (μm) 0.1 0.1 0.3 0.5 1
Z - direction Resolution (μm) 0.01 0.01 0.03 0.05 0.2
Angular Characteristic (°) ±45° ±45° ±33.5° ±33.5° ±27°

 


Software
Equipped with dedicated processing software, it can perform various operations as shown in the following figure for 3D size inspection.

Applications
 
Grayscale image of ceramic circuit coatings
Parameters Unit Average Min Max Step 1  Step 2  Step 3  Step 4
Maximum Height μm 8.547 7.944 9.064 7.944 8.412 8.741 9.134
Average Height μm 8.375 7.841 8.868 7.841 8.184 8.609 8.163
Height measurement of ceramic circuit coatings
 
 
Grayscale image of silicon carbide wafers
Parameters Unit Step 1
Maximum Height μm 1.72
Average Height μm 1.508
Measurement of scratch depth on silicon carbide wafers
 
 
Grayscale image of MLCC circuit
Parameters Unit Average Min Max Step 1  Step 2
Maximum Height μm 12.62 12.56 12.68 12.55 12.68
Average Height μm 11.11 11.04 11.18 11.04 11.18
MLCC circuit profile measurement
 
 
Grayscale image of Micro LED
Parameters Unit Step 1  Step 2
Maximum Height μm 4.428 9.634
Average Height μm 4.094 9.583
Mirco LED circuit profile measurement 

Dimensions(mm)
SX01-L3D-5010 SX01-L3D-5020
SX01-L3D-5030 SX01-L3D-5040

Sale Guide
If you need our technical team for guidance on product selection or customization,please help to provide below technical information, it helps to speed up the process.
Items Detail Unit Remark
Application field?     The applicable fields include electronic components, display panels, lenses/glass, etc
What type of object needs to be measured?     Glass, highly reflective metals, ceramics, ultra-smooth surfaces/mirrors, etc
In addition, the linear confocal displacement sensor can also measure materials such as ceramic circuits, artificial leather, and biological fossils
Measurement type?     Is it necessary to measure displacement, height, surface morphology and deformation? Or others
What is the required measurement range?
That is, the range requirement?		      
What are the requirements for measurement accuracy?      
What is the motion state of the object being measured?Stationary or in motion?     If it is a moving object, a higher sampling frequency is required
What is the distance from the probe to the center
of the sample, that is, the working distance?		      
       

 

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Search Reset
Compare Model Drawings & Specs Availability Reference Price
(USD)
SX01-L3D-5010
Working Distance: 11.5mm; Z - direction Range: 0.77mm; X - direction Measurement Range: 2.2mm; Points/Contour Lines: 1928 		4~6 weeks Request for quote
SX01-L3D-5020
Working Distance: 11.5mm; Z - direction Range: 0.8mm; X - direction Measurement Range: 3.2mm; Points/Contour Lines: 1928 		4~6 weeks Request for quote
SX01-L3D-5030
Working Distance: 10mm; Z - direction Range: 1.3mm; X - direction Measurement Range: 3mm; Points/Contour Lines: 1832 		4~6 weeks Request for quote
SX01-L3D-5040
Working Distance: 10mm; Z - direction Range: 1.3mm; X - direction Measurement Range: 4.3mm; Points/Contour Lines: 1832 		4~6 weeks Request for quote
SX01-L3D-5110
Working Distance: 36.5mm; Z - direction Range: 3mm; X - direction Measurement Range: 12mm; Points/Contour Lines: 2000 		4~6 weeks Request for quote

SX01-L3D-5110 - Parameter

SX01-L3D-5040 - Parameter

SX01-L3D-5030 - Parameter

SX01-L3D-5020 - Parameter

SX01-L3D-5010 - Parameter

SX01-L3D-5110 - Download

SX01-L3D-5040 - Download

SX01-L3D-5030 - Download

SX01-L3D-5020 - Download

SX01-L3D-5010 - Download

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Compare Model Drawings & Specs Availability Reference Price
(USD)

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