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Multi Axis Motorized Piezo Stages | SIMTRUM Photonics Store

Multi Axis Motorized Piezo Stages

Three-axis Motorized Piezo Stage - ST-XY3-5050+ST-VS-0812

SIMTRUM's three-axis motorized piezo stage (ST-XY3-5050+ST-VS-0812) is a XYZ stage with +/-25mm stroke  for  X,Y stage and +/-6mm for Z stage. It has repeatability up to +/-200nm.

 

Feature

 
  • Piezoelectric motor drive, self-locking when power off, saving energy and reducing heat generation
  • Simple and compact design
  • Grating feedback, optional resolution
  • Can be used in optical assembly, micro-nano processing, laser, automation and other fields
                                     

 

 

 

Product Specifications and Brochures

Product Brochure Link:

Model Three-axis Motorized Piezo Stage(ST-XY3-5050+ST-VS-0812)
X,Y Stage Stroke(mm) +/-25
Z Stage Stroke(mm) +/-6
Driver Piezoelectric Motor
Maximum Load Capacity(KG) 2
Maximum Speed(mm/s) 30
X,Y Stage Minimum Step Size(nm) 50
X,Y Stage Repeatability(nm) +/-200
Z Stage Minimum Step Size(nm) 50
Z Stage Repeatability(nm) +/-200
Material Aluminum Alloy

 

 

 

Drawings

Front Back Side

Three-axis Motorized Piezo Stages 

These three-axis motorized piezo stages are XYR stages,with X,Y stage stroke up to +/-25mm and R stage stroke up to 20°.

 

Feature

 
  • Piezoelectric motor drive, self-locking when power off, saving energy and reducing heat generation
  • Simple and compact design
  • Grating feedback, optional resolution
  • Can be used in optical assembly, micro-nano processing, laser, automation and other fields
       

 

 

Product Specifications and Brochures

Product Brochure Link:

Model Three-axis Motorized Piezo Stage(ST-XY3-5050+ST-RS-100C) Three-axis Motorized Piezo Stage(XYR-202020)
Image

X,Y Stage Stroke(mm) +/-25 20
R Stage Stroke(°) +/-6 20
Driver Piezoelectric Motor Piezoelectric Motor
Maximum Load Capacity(KG) 10 /
Maximum Speed(mm/s) 30 50
Minimum Step Size(nm) / 200
X,Y Stage Minimum Step Size(nm) 100 /
X,Y Stage Repeatability(nm) +/-200 +/-300nm
R Stage Minimum Step Size(°) 0.0005 /
R Stage Repeatability(°) +/-0.0005 +/-0.001
Position Sensor / Grating
Material Aluminum Alloy Aluminum Alloy
Weight(KG) / 8.5

 

 

Drawings

 

ST-XY3-5050+ST-RS-100C

 

 

 

 

 

 

Front Side Side

 

 

 

 

ST-XYR20-202020

 

 

 

 

 

 

 

 

Front Back Side

Six-axis Motorized Piezo Stages

Our six-axis motorized piezo stage includes X stage, Y stage, Z stage, R stage, G stage.It can be used in optical assembly, micro-nano processing, laser, automation and other fields.

 

 

Feature

 
  • Piezoelectric motor drive, self-locking when power off, saving energy and reducing heat generation
  • Simple and compact design
  • Grating feedback, optional resolution
  • Can be used in optical assembly, micro-nano processing, laser, automation and other fields
                       

 

 

Product Specifications and Brochures

Product Brochure Link:

Model Six-axis Motorized Piezo Stage G Stage Minimum Step Size(°) 0.0002
X Stage Stroke(mm) +/-12.5 G Stage Repeatability(°) +/-0.0004
X Stage Minimum Step Size(nm) 100 Position Sensor(nm) Grating
X Stage Repeatability(nm) +/-300 Position Sensor Resolution 100
Y Stage Stroke(mm) +/-12.5 Driver Piezoelectric Motor
Y Stage Minimum Step Size(nm) 100 Maximum Fixed Load(KG) 0.15
Y Stage Repeatability(nm) +/-300 Maximum Speed(mm/s) 20Open Loop
Z Stage Stroke(mm) +/-10 Material Aluminum Alloy
Z Stage Minimum Step Size(nm) 100 Power Supply 220VAC
Z Stage Repeatability(nm) +/-300 Maximum Power Consumption(W) 50
R Stage Stroke(°) +/-5 Operating Temperature(°C) 15-35
R Stage Minimum Step Size(°) 0.0002 Working Humidity 0-85%
R Stage Repeatability(°) +/-0.0004 Storage Temperature(°C) -40-70 
G Stage Stroke(°) +/-5 Weight(KG) 6.4

 

 

Drawings

 

Side  Side  Top

Motorized Piezo Stage Controller for Three Axis 

 

1.Control box

 

Control Box Front Panel Back Panel

 

 

1.1 Power Interface

Using the DC interface, the input power is: 24V (20V~30V).

 

1.2 Communication Interface

Using a B-type USB cable.

1.3 Indicator Light

The indicator light is divided into status indicator light and power indicator light."POWER" is the power indicator light, which is used to indicate whether the power is on.

 

There are 6 status indicator lights, with two lights representing the status of each axis .From top to bottom,the indicator lights represent axis 1 to axis 3. In the same row, the left side is for ALARM1, and the right side is for ALARM2 (As shown in the left figure)

 

Meaning of Indicator Lights

Indicator Light Green Flashing Steady Green Red Flashing Steady Red
ALARM1 / Drive Enable 0.5s blinking once: searching for zero process. Blocking Protection
ALARM2 Motor Access / (1) Blinking once: Communication input parameter error Motor Not Plugged In
(2) Blinking once every 1 second: BootLoader mode indicates no APP
(3) Blinking once every 0.5 seconds: BootLoader mode
(4) Blinking once every 0.1 seconds: BootLoader mode indicates no secret key,unable to enter APP

 

 

 

1.4  I/O Interface

The interface used is DB9 female connector (As shown in the left figure). There are 3 DB9 connectors on the control box, corresponding to the I/O interface of axis 1, axis 2, and axis 3. Each DB9 interface is defined the same way and corresponds to the axis number used, as shown in the following table.

 

 

 

 I/O Interface Structure The Limit Switch Detection Circuit

 

 

 I/O Interface Definition

Hole Number Definition Illustrate
1 Pulse Output (Default) Pulse Output Pin (Maximum Current 30mA)
2 Update Program When updating the program, this pin is grounded
3 Motor Stop /
4 - Limit Limit Detection Pin (Maximum Current 30mA)
5 + Limit Limit Detection Pin (Maximum Current 30mA)
6 NULL /
7 5V Output 5V Power Supply (Maximum Output 1A)
8 Controller GND GND

Note:When wiring the DB9 interface, please be careful to avoid short-circuits caused by miswiring. Short-circuits between pins can potentially damage the drive controller. Connecting to the NULL interface is strictly prohibited

 

 

1.5 Encoder Interface

The interface used is a DB15 female connector with two rows, and its specific definitions are shown in the following table.

 

 Encoder Interface Definition

Pin Number of DB15 Definition Pin Number of DB15 Definition
1 NULL 9 0V
2 0V 10 NULL
3 NULL 11 NULL
4 Z- 12 Z+
5 B- 13 B+
6 A- 14 A+
7 5V 15 NULL
8 5V    

 

 

1.6 Motor Interface

The interface used is a DB9 male connector with two rows, and its specific definitions are shown in the following table.

 

 Motor Interface Definition

Pin Number of DB9 Definition Illustrate
1 Connected to GND GND
2 NULL /
3 Phase A Connect to the motor
4 COM (Common) Connect to the motor
5 Phase B Connect to the motor
6 Detection DB9 detection access 
7 System Grounding /
8 NULL /
9 NULL /

Note: Pins 6 and 7 are shorted for detecting DB9 access.Please cut off the power supply when connecting the patch cord, please do not impede the movement for a long time when the platform is driven ,or  the motor may be burn out.

 

 

2. Internal Structure

The inside of the control box includes a front panel PCB, a back panel PCB, and 3 controllers, which are connected together by connecting wires.

 

3.The steps to use the control box are as follows

1.To connect the plug of the stage to the controll box

(1) Insert the motor plug of the stage axis 1 (X) into the motor socket of axis 1 in the control box (DB9 connection), and insert the encoder plug of axis 1 (X) into the encoder socket of axis 1 in the control box (DB15 connection)

(2) Insert the motor plug of the stage axis 2 (Y) into the motor socket of axis 2 in the control box (DB9 connection), and insert the encoder plug of axis 2 (Y) into the encoder socket of axis 2 in the control box(DB15 connection)

(3) Insert the motor plug of the stage axis 3 (Z) into the motor socket of axis 3 in the control box(DB9 connection), and insert the encoder plug of axis 3 (Z) into the encoder socket of axis 3 in the control box(DB15 connection)

 

2.Connect the control box and the computer with the USB cable

 

3.Connect the circular plug of the 24V power adapter to the power socket on the control box

 

4.Turn on the power switch on the control box

 

5.Use the upper computer to control the stage (Refer to the relevant user manual for instructions on using the upper computer)

 

 


Motorized Piezo Stage

Product Travel Distance Max. Load Capacity Max. Speed Min. Step Size Repeatability
 Single Axis Motorized Piezo Stage
0 ~ 25 mm
90° ~ 360°
0.3 ~ 5 kg
20 ~ 100 mm/s
20°/s ~ 360°/s
50nm ~ 3um
<0.0001° ~ 0.001°
± 100nm ~ ± 5um
± 0.0005° ~ ± 0.002°
 XY Motorized Piezo Stages
50 x 25 mm ~ 105 x 105 mm
1 ~ 10 kg
50 ~ 100 mm/s
20 ~ 100nm
± 200nm
 Multi Axis Motorized Piezo Stages ± 6 ~ ± 25 mm
± 5° ~ ± 6°
(Customizable)

0.15 ~ 10 kg

(Customizable)

20 ~ 50 mm/s (Customizable)
50 - 200 nm
0.0002° ~ 0.0005°
(Customizable)
± 200 ~ ± 300nm
± 0.0004° ~ ± 0.0005° (Customizable)
 XY Microscope Piezo Stages 75 x 50 mm ~ 110 x 75 mm 1 kg 100 mm/s 20 ~ 100 nm ± 200nm
 Vacuum Non-magnetic Piezo Stage 18 ~ 70 mm 1 ~ 10 kg 100 mm/s 150 ~ 300 nm ± 500
 Nano Electric Actuator 12 mm 1.5 kg 0.5 mm/s 30 nm /

 

 

 

Confocal Microscope Systems

Our motorized piezo stage can be applied to microscope related systems ,  below is the confocal microscope systems we produced. if you need customized system please contact us.

Laser Scanning Confocal Microscope Laser Line Scan Confocal Microscope Spinning Disk Confocal Microscope
           
Structured Illumination Microscope

 

Wide Field Raman Microscope

Fluorescence / Photoluminescence Microscope

 

Parameters

Basic

P Series Box

Basic

P Series

Advance

P Series

Basic

L Series

Advance

L Series

SpinDisk

Basic

SpinDisk

 Advance

SIM Basic SpinDisk SIM
Image Frame Rate 4fps@512x512 4fps@512x512 4fps@512x512 10fps@1024x1024 14fps@1024x1024 100fps@2048x2048 100fps@2048x2048 13fps@1024x1024 13fps@1024x1024
Resolution ~230 nm  ~230 nm  ~230 nm  ~230 nm  150-200nm ~230 nm  ~230 nm  ~100 nm  ~100 nm 
Image Depth <100µm <100µm <100µm <100µm <600µm <200µm <200µm <50µm <200µm
No. of Laser  1 1 4 1 4 4 4 4 4
Wavelength Choice 

405/445/488

/525/561/640(nm)

405/445/488/

525/561/640(nm)

405/488/561/

640(nm)

405/445/488/

525/561/640(nm)

405/488/561/

640(nm)

405/445/470/520/

528/555/640(nm)

405/445/470/520/

528/555/640(nm)

405/445/470/520/

528/555/640(nm)

405/445/470/520/

528/555/640(nm)

Detectors Detector Detector Detector CMOS Camera sCMOS Camera sCMOS Camera Dual sCMOS Camera(Single sCMOS optional) sCMOS Camera Dual sCMOS Camera(Single sCMOS optional)
Microscope  Non Inverted (Upright Customizeable) Inverted (Upright Customizeable) Inverted (Upright Customizeable) Inverted (Upright Customizeable)

Inverted or

Upright 

Inverted or

Upright 

Inverted or

Upright 

Inverted
Stages Non

Z Motorized

XY Manual

XYZ Motorized  Z Motorized
XY Manual
XYZ Motorized  XYZ Motorized  XYZ Motorized  XYZ Motorized  XYZ Motorized 
Electronics system / / Motorized Filter
Motorized Pin hole
/ Motorized Filter Motorized Filter Motorized Filter Motorized Filter Motorized Filter

 

 


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Compare Model Drawings & Specs Availability Reference Price
(USD)
Customized Multi Axis Motorized Piezo Stage
Customized Multi Axis Motorized Piezo Stage, Contact us for specific models
6-8 weeks Request for quote
ST-XY3-5050+ST-VS-0812
Multi Axis Motorized Piezo Stages, X,Y Stage Stroke +/-25mm, Z Stage Stroke +/-6mm, Driver Piezoelectric Motor, Maximum Load Capacity 2KG, Maximum Speed 30mm/s, X,Y Stage Minimum Step Size 50nm, X,Y Stage Repeatability +/-200nm, Z Stage Minimum Step Size 50nm, Z Stage Repeatability+/-200nm, Material Aluminum Alloy
6-8 weeks Request for quote
ST-XY3-5050+ST-VS-0812
Multi Axis Motorized Piezo Stages, X,Y Stage Strok +/-25mm, R Stage Stroke +/-6°, Driver Piezoelectric Motor, Maximum Load Capacity 10KG, Maximum Speed 30mm/s, X,Y Stage Minimum Step Size 100nm, X,Y Stage Repeatability +/-200nm, R Stage Minimum Step Size 0.0005°, R Stage Repeatability +/-0.0005°, Material Aluminum Alloy
6-8 weeks Request for quote
XYR-202020
Multi Axis Motorized Piezo Stages, X,Y Stage Stroke 20mm, R Stage Stroke 20°, Driver Piezoelectric Motor, Maximum Speed 50 mm/s, Minimum Step Size 200nm, X,Y Stage Repeatability +/-300nm, R Stage Minimum Step Size +/-0.001°, Material Aluminum Alloy
6-8 weeks Request for quote
Six-axis Motorized Piezo Stage
Multi Axis Motorized Piezo Stages, X Stage Stroke +/-12.5mm, X Stage Minimum Step Size 100nm, X Stage Repeatability +/-300nm, Y Stage Stroke +/-12.5mm, Y Stage Minimum Step Size 100nm, Y Stage Repeatability +/-300nm, Z Stage Stroke +/-10 mm, Z Stage Minimum Step Size 100nm, Z Stage Repeatability +/-300nm, R Stage Stroke +/-5°, R Stage Minimum Step Size 0.0002°, R Stage Repeatability+/-0.0004°, G Stage Stroke+/-5°, G Stage Minimum Step Size 0.0002°, G Stage Repeatability +/-0.0004°, Maximum Fixed Load 0.15KG, Maximum Speed 20mm/s(Open Loop)
6-8 weeks Request for quote

Six-axis Motorized Piezo Stage - Parameter

XYR-202020 - Parameter

ST-XY3-5050+ST-VS-0812 - Parameter

ST-XY3-5050+ST-VS-0812 - Parameter

Customized Multi Axis Motorized Piezo Stage - Parameter

Six-axis Motorized Piezo Stage - Download

XYR-202020 - Download

ST-XY3-5050+ST-VS-0812 - Download

ST-XY3-5050+ST-VS-0812 - Download

Customized Multi Axis Motorized Piezo Stage - Download

Accessories

Compare Model Drawings & Specs Availability Reference Price
(USD)