EUV Light Sources | SIMTRUM Photonics Store

Simtrum's EUV windowless source is an RF excited flow lamp with a capillary bore in an EMI shielded enclosure. This lamp mounts to a 33.78 mm or larger CF type flange. The lamp assembly has an integral RF exciter which is powered by a small wall plug power supply. This supply is sufficient to produce emissions from the principal neutral rare gas species in the range of 10^15 photons per second per steradian. When coupled with a Resonance VM series monochromator, this will work as a tunable light source from 58 nm to up to 800 nm.

Features

Greater than 10^15 photons/sec/ster for major spectral lines
Provides EUV light down to 58nm
<1kg mass
Easy connection to a monochromator for use as an EUV tunable light source
Low astigmatism

Application

Semiconductor Manufacturing
Materials Science
Optoelectronic Devices
Biomedical Applications

Specification

Power In	110-240V
Power Supply	28W RF
Current	0.5A @110V typical
Mass	800g
Intensity	>10^15 ph/sec/str(for major spectral lines)
Vacuum Adapter	2 3/4" CF flange standard
Wavelength Reproducibility	±0.2nm

Gas Specifications

Species	He	Ne	Ar	H	O	N	Cl	N2
Wavelength	58.43	73.59 & 74.37	104.82 & 106.67	102.57 & 121.57	130.22, 130.48 & 130.61	120	118	LBH Bands

Spectral Curve

Mechanical Diagram

Microscope Light & Lamp (185 - 5500nm)

Product Type	Wavelength Range	Power output	Color Temperature	Lifespan	Bulb Voltage / Power
Deuterium Light Source	185 - 600 nm	25W-30W (deuterium lamp)	N/A	1,500 hours	Lighting voltage 580 V@20 ℃
Halogen Light Source	360 - 2500 nm	1.7-8.5 mW	2330K - 3000K	2,000 - 10,000 hours	3.5 V - 12 V
Deuterium & Halogen Light Source	360 - 2500 nm	3.0-8.5 mW	2800K - 3000K	2,000 - 10,000 hours	5 - 20 W
Infrared Tungsten Light Source	450 - 5500 nm	7.5 W	1900k	≥ 5,000 hours	N/A
Calibration Light Source - Mercury Argon	253 - 1700 nm	N/A	N/A	≥ 6,000 hours	N/A
Calibration Light Source - Neon	540 - 754 nm	N/A	N/A	N/A	N/A
Calibration Light Source - Xenon Lamp	916 - 1984 nm	3 W	N/A	3,000 hours	N/A
Xenon Light Source	200 - 2000 nm	8.0 mW	N/A	≥ 1,000 hours	50 W

Single Wavelength LED Source(240-980nm）

Link

Un-collimated LED Sources (240-980nm) / 50mW to 900mW Level

Collimated LED Sources (240-980nm) / 15mW to 10,000mW Level

High Power Fiber-Coupled LED (240-980nm) / uW to 40mW Level

Filtered High Power Fiber-Coupled LED (265 - 940nm) / uW to 10mW Level

Lightguide-Coupled LED Source (240-980nm) / 10mW to 2500mW Level

LED Source Controllers

Multi-wavelength LEDs Source (240-980nm)

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Fiber-Coupled Multi-Wavelength LED（365nm to 980nm)

Collimated Multi-Wavelength LED（365nm to 980nm)

Wavelength-Switchable LED (340nm to 980nm)

LED Source Controllers

ASE Light Sources (830-2000nm)

Type	Spectral Range (nm)	Output Optical Power(mW)
C-Band Broadband ASE Light Source	1528 - 1563	10/20/50/100/200/400
L-Band Broadband ASE Light Source	1567 - 1603	10/20/50/100
C+L Band Boardband ASE Light Source	1528 - 1603	10/20/50/100/200
C++ Band Boardband ASE Light Source	1524 - 1572	10/20/50/100/200
1060nm Broadband ASE Light Source	1030 - 1080	10/20/30/50
2000nm Broadband ASE Light Source	1850 - 2000	10

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	Availability	Reference Price (USD)
LL-RE01-EUV-He-L Wavelength：58.43nm，Wavelength Reproducibility：±0.2nm，Intensity：>10^15 ph/sec/str(for major spectral lines)，Power Supply：28W RF	4-6week	$17552.31
LL-RE01-EUV-Ne-L Wavelength：73.59 & 74.37nm，Wavelength Reproducibility：± 0.2nm，Intensity：>10^15 ph/sec/str(for major spectral lines)，Power Supply：28W RF	4-6week	$17552.31
LL-RE01-EUV-Ar-L Wavelength：104.82 & 106.67nm，Wavelength Reproducibility：±0.2nm，Intensity：>10^15 ph/sec/str(for major spectral lines)，Power Supply：28W RF	4-6week	$17552.31
LL-RE01-EUV-H-L Wavelength：102.57 & 121.57nm，Wavelength Reproducibility：±0.2nm，Intensity：>10^15 ph/sec/str(for major spectral lines)，Power Supply：28W RF	4-6week	$17552.31
LL-RE01-EUV-N-L Wavelength：120nm，Wavelength Reproducibility：±0.2nm，Intensity：>10^15 ph/sec/str(for major spectral lines)，Power Supply：28W RF	4-6week	$17552.31
LL-RE01-EUV-N-L Wavelength：120nm，Wavelength Reproducibility：±0.2nm，Intensity：>10^15 ph/sec/str(for major spectral lines)，Power Supply：28W RF	4-6week	$17552.31
LL-RE01-EUV-Cl-L Wavelength：118nm，Wavelength Reproducibility：± 0.2nm，Intensity：>10^15 ph/sec/str(for major spectral lines)，Power Supply：28W RF	4-6week	$17552.31
LL-RE01-EUV-N2-L Wavelength：LBH Bands，Wavelength Reproducibility：+/- 0.2nm，Intensity：>10^15 ph/sec/str(for major spectral lines)，Power Supply：28W RF	4-6week	$17552.31

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EUV Light Sources | SIMTRUM Photonics Store

Features

Application

Specification

Spectral Curve

Mechanical Diagram

Microscope Light & Lamp (185 - 5500nm)

Single Wavelength LED Source(240-980nm）

Multi-wavelength LEDs Source (240-980nm)

ASE Light Sources (830-2000nm)

LL-RE01-EUV-N2-L - Parameter

LL-RE01-EUV-Cl-L - Parameter

LL-RE01-EUV-N-L - Parameter

LL-RE01-EUV-N-L - Parameter

LL-RE01-EUV-H-L - Parameter

LL-RE01-EUV-Ar-L - Parameter

LL-RE01-EUV-Ne-L - Parameter

LL-RE01-EUV-He-L - Parameter

LL-RE01-EUV-N2-L - Download

LL-RE01-EUV-Cl-L - Download

LL-RE01-EUV-N-L - Download

LL-RE01-EUV-N-L - Download

LL-RE01-EUV-H-L - Download

LL-RE01-EUV-Ar-L - Download

LL-RE01-EUV-Ne-L - Download

LL-RE01-EUV-He-L - Download

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