Photodiodes(Wavelength 5-125 nm) | SIMTRUM Photonics Store

Our photodiodes (wavelength 5-125nm) are highly suitable for use in the following scenarios:

• EUV lithography machine
• Excimer laser
• EUV light source
• EUV ultraviolet spectrometer
• EUV synchrotron radiation light source monitoring

EUV (Extreme Ultraviolet) photons carry energy far exceeding the bandgap of silicon carbide (SiC). As a result, incident photons can excite electrons from the valence band to the conduction band within an extremely shallow depth near the material surface, instantaneously generating electron-hole pairs. Simultaneously, a strong electric field region is formed within the depletion region—located at a depth of several nanometers to tens of nanometers in the outermost layer of the device. Under the influence of this strong electric field, photogenerated electrons and holes drift rapidly in opposite directions: electrons move toward the n-type region, while holes migrate to the p-type region. This directional carrier movement generates a photocurrent in the external circuit, whose intensity is proportional to the incident EUV light intensity, thereby enabling precise detection and measurement of EUV radiation.

Furthermore, owing to SiC’s inherent advantages—including high critical displacement energy, low intrinsic carrier concentration, and excellent high-temperature stability—the device achieves high quantum efficiency (QE), outstanding radiation resistance, and low dark current.

Advantages:

• Multiple photosensitive areas available, including ultra-large photosensitive areas
• High quantum efficiency (QE)
• Low dark current
• Excellent radiation resistance

Q: How to choose between TO packaging and ceramic packaging?

A: Ceramic packaging uses hermetic sealing, while TO packaging is mostly non-hermetic or resin-filled sealed. Therefore, ceramic packaging is more recommended for harsh environments. Additionally, ceramic packaging has a higher thermal conductivity, which is more conducive to device stability, but it is also more expensive than TO packaging.